SEOUL, Korea – February 19, 2025 – Park Techniques, a worldwide chief in atomic power microscopy (AFM), has unveiled an expanded FX Massive Pattern AFM sequence at SEMICON Korea 2025. Constructing on the success of Park FX200, which debuted at SEMICON West 2024 and has since gained sturdy market traction in Germany, Japan, and Korea, Park Techniques introduces Park FX300 for 300 mm wafer evaluation, alongside Park FX200 IR and FX300 IR, which combine infrared (IR) spectroscopy, pushing the boundaries of large-sample AFM expertise.
Picture Credit score: Park Techniques
As 300 mm wafers develop into the semiconductor {industry} normal, the Park FX300 is designed for these searching for high-precision evaluation with out the complexity of a totally automated inline system. It additionally serves as a really perfect resolution for corporations contemplating AFM implementation earlier than transitioning to inline fabrication.
Optimized for each industrial and analysis functions, the Park FX300 is anticipated to be a game-changer, delivering superior capabilities for evaluation and high quality management throughout a variety of AFM strategies. It’s outfitted with specialised options similar to a Sliding Stage for long-range flatness measurements of copper pads in semiconductor post-processing, a Rotation Stage for exact pattern alignment in wafer-level packaging, and an Off-Axis Optics system for enhanced pattern visualization. Moreover, its Fan Filter Unit (FFU) ensures a managed, contamination-free setting, making it ideally suited for cleanroom functions.
Park Techniques has additionally launched FX200 IR and FX300 IR, increasing its AFM expertise into the realm of nanoscale chemical evaluation. By integrating Fourier Remodel Infrared Spectroscopy (FTIR) with AFM, these fashions make the most of Photograph-induced Power Microscopy (PiFM) to allow chemical identification with a spatial decision lower than 5 nm. This breakthrough permits researchers and engineers to investigate the chemical composition of nanoscale constructions with out damaging wafer surfaces, opening new prospects for materials characterization in semiconductor, polymer, and life science functions.
Designed for samples starting from small sizes to 200 mm or 300 mm wafers, the FX200 IR and FX300 IR allow high-resolution infrared spectral imaging, offering unprecedented insights into materials composition and molecular interactions. With its means to seize chemical bonding info at an ultra-fine scale, it enhances semiconductor defect evaluation, polymer analysis, and superior materials characterization with unmatched precision.
Picture Credit score: Park Techniques
Rooted in Park Techniques’ philosophy of maximizing effectivity whereas minimizing guide intervention, the FX Massive Pattern AFM sequence enhances usability with automated probe recognition and change, a QR code system for probe standing monitoring, and AI-driven laser alignment for seamless operation. The StepScan™ perform additional boosts effectivity by enabling automated sequential measurements at predefined coordinates, permitting researchers to investigate topography, electrical, mechanical and magnetic properties with minimal guide intervention. Particularly in IR functions, the place laser alignment is usually a major problem, the methods totally automates the method, making high-resolution chemical evaluation extra accessible than ever earlier than.
Dr. Sang-Joon Cho, Government Vice President of Park Techniques, emphasised the corporate’s dedication to technological management: “Embodying Park Techniques’ a long time of experience and innovation in precision measurement and automation, we have now optimized the FX Massive Pattern AFM sequence for wafer evaluation on the highest stage for each industrial and analysis fields. Park FX300 and the nano-IR methods are redefining the boundaries between industrial and analysis AFM functions, empowering our clients with essentially the most superior AFM obtainable—shaping the way forward for nanoscience collectively.”
With its newest improvements, Park Techniques continues to solidify its place as a worldwide chief in atomic power microscopy, offering industry-leading options for the ever-evolving calls for of semiconductor and nanoscience analysis.
About Park Techniques Corp. (KOSDAQ: 140860)
A pioneer and chief in nanometrology options with its manufacture of the best high quality atomic power microscopes (AFM), Park Techniques Corp. has additional distinguished itself from {industry} rivals by its unparalleled dedication to cultivating and nurturing legacy skilled relationships with researchers and engineers of all scientific fields and throughout various disciplines together with supplies science, physics, chemistry, life sciences, semiconductors, and knowledge storage. The corporate’s mission is to drive nanoscale improvements for scientists and engineers and advance scientific discoveries. Park Techniques’ shoppers embody high semiconductor corporations and analysis universities worldwide. With headquarters in Suwon, Korea, and regional places of work throughout the Americas, Europe, and Asia, Park Techniques is publicly traded on the Korea Inventory Change (KOSDAQ). Be taught extra at www.parksystems.com.
